Axcelis Announces the Launch of the Company's New GSD Ovation ES Enabling Best-in-Class High Current Batch Implant Capability for Engineered Substrates
Axcelis(US:ACLS) Prnewswire·2025-09-08 20:00公司动态 - 离子注入解决方案供应商Axcelis Technologies Inc宣布推出GSD Ovation™ ES高电流离子注入机 [1] - 新产品专门针对工程基板市场 [1]